Synchrotron radiation x-ray source: the choice for x-ray lithography
{"Image DocumentName": "Synchrotron radiation x-ray source: the choice for x-ray lithography", "Image ImageDescription": "Shield Wall. Storage Ring. Synchrotron radiation (SR): Electromagnetic radiation (light) emitted from electrons (positrons) moving with relativistic velocities on macroscopic circular orbits. First observed in 1947 from a 70MeV electron accelerator at the GE. In earlier times, it was just considered as waste product limiting accelerator performance. However, other researchers soon realized that SR was the brightest source of infrared, ultraviolet, and x-rays, very useful for studying matter on the scale of atoms and molecules. Irradiation is highly polarized and pulsed (e.g. nanosecond pulse). Due to extreme collimation of light, observer sees only a small portion of electron trajectory. The pulse length is the difference in times it takes an electron and a photon to cover this distance.", "Image XResolution": "37", "Image YResolution": "37", "Image ResolutionUnit": "Pixels/Centimeter", "Image Software": "SlidePlayer", "Image YCbCrPositioning": "Centered"}